The Endura system has a long list of firsts: it was the first ultra-high vacuum production system in the industry, enabling enormously improved film purity which reduced electromigration by an order of magnitude, and allowed our customers to fabricate the first reliable aluminum interconnects. Any website or e-book is ok for me. 4715 Steiner Ranch Blvd. In the simplest terms, the CTP 2E logs and issues real-time warnings and alarms and generates standard summary reports, completely automatically, for those chambers equipped with an.
• AMAT serial is 2506 • estimated vintage is mid 90’s. Compare the times to that of the System Manager. Applied Materials&39; Endura platform: what customers say it: â€œWhen the Endura system was first released, it set a new bar for technical performance and reliability in PVD. Amat Endura 5500, 300mm Etch Chamber, ( needs refurb) ,500. Applied Materials, 200mm Cassette Alignment Tool Wafer, CD+ AMAT LCAT200P-1. Included: 1) Applied MaterialsCover Ring, Specifications: Manufacturer: Applied Materials, AMAT Part, Revision: A, Description: Cover Ring SST 8" 5500 PVD, Size: 200mm(8.
Applied Materials has produced Endura 5500 PVD. SSSco Headquarters. The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot. 00" Cycle Count: 1, For Use With: Applied Materials Endura 5500 PVD(Physical Vapor Deposition) Systems, Total Weight: 4. The User ID must be AMAT to modify any RGA SECS communications settings. Area cleaned with Scotch-Brite™* is re-cleanecleaned d using the Foamtec pads.
2) Using the Endura light pen, select System from the Main Menu bar located at the top of the screen. Battery Charger, Dvr user manuals, operating guides & specifications. NEW AMAT applied materials wide range vacuum gauge pirani / ion.
1 document id: an-harp1 application note amat producer®* harp™* heater assembly pm objective: to effectively remove the deposition on the edge of the applied materials®*. Refer to the installation manual for your specific product for detailed information. AMAT ENDURA MOCVD 150mm Gas Panel Assy MFC STEC 4400 * 3 MFC Down Steam Valve Yes Manual Shut Off Valve Yes MFC Control Cable Yes MFC Inter-Connect PCB Yes CH 5 (Blank) CH C (PC II Etch) Resenator Yes CH C (PC II Etch) Pedestal Lift Yes MKS Manometer Yes Convectron Gauge Yes Ion Gauge Yes Turbo Pump Yes Wafer Lift Yes RF Match Yes Process Kit Yes. The tool is fully automatic and takes pieces (on a puck) and 6" wafers. Daily Check front panel indicators. 3) Select Login/Logout. Call us:. AMAT ENDURA PVD DeGas Chamber 3rd Gen PM 100308.
The resulltt s are a cleaner chamber containingg fewer visible. Reliable and complete filling of interconnect trench and via structures with copper is vital for device reliability in microelectronic fabrication. Our Mission – To be the global leader in nanomanufacturing technology solutions for the electronics industry, through differentiated and innovative system, service and software products, providing our customers a trusted path to superior. System cores and spare pumps are also available. PVD for 200mm power devices, MEMS and RF applications is a key emerging technology segment for Applied Materials. Manufacturer: Applied Materials AMAT Condition: Used. Use of the CTP2E will facilitate improved Endura utilization and reduce scrap during production.
Run a one time script using the command "date". For more info, please visit amat endura manual The endura is a GREEN metal sputtering system that sputters Ti, TiN, Al, and Al/Si. ˆ Low Risk H i g h R i s k Operating parameters of EG conducive to low rate of degradation Operating parameters of E G conducive to high rate of s d e g r a d a t i o. If you are looking to buy or sell second hand AMAT ENDURA, please visit EquipMatching.
Mark Liu, then senior vice president of Operations at TSMC â. This was a standard configuration option from AMAT – allows more process gas to be used and longer times between regens, actually the water pump regens very quickly. Its condition is used, second hand, surplus, or refurbished. Nordson EFD PICO 774-HV-100-D4000-Z Valve Jet. Endura ® Volta™ Selective W CVD Tungsten has been widely used as a gapfill material in middle-of-line (MOL) contacts for its low resistivity and bulk fill. Quantity: 1, SKU. EquipMatching Ad 21123.
Essential steps in this process are the depositing of a barrier (to prevent copper diffusion into the surrounding insulating material) and a copper seed layer that facilitates subsequent electrochemical deposition (or plating). amat endura 5500 manual Anyone has manual for this tool. 4) Enter the User ID (AMAT) using the displayed alpha/numeric keypad and click Enter.
Condition: Used, Quantity: 1, SKU: N15P023 For questions. Applied Materials amat endura manual Our Vision – We apply nanomanufacturing technology to improve the way people live. AMAT Centura PVD System Config o Chambers have a cold trap (aka water pump) and turbo pumps. Applied Materials PTB Sales offers vacuum component support for your Applied Materials AMAT high vacuum systems - Centura 5200 Etch, Endura 5500 PVD, Producer and the legendary Precision P5000. Original OEM Manuals for Amat Centura 200mm tool. To serve amat endura manual customers in these markets, the industry-standard Applied Endura 200mm PVD chamber has been enhanced to deliver a competitive, state-of-the-art, single-chamber and cluster solution for thick Al and AlN that meets volume. amat degas chamber before pm amat degas chamber after pm.
View & download of more than 96 Endura PDF user manuals, service manuals, operating guides. Manufacturer: Applied Materials AMAT Model:Condition: Used Price: The photos show the exact item(s) the buyer will receive. View product detail.
Included: 1) Applied Materials AMATPrecision 5000 CVD Nitride 4-6" Gas Box, Specifications: Manufacturer: Applied Materials(AMAT) AMAT Part, Revision: Rev. MAINTENACE TASKS FOR ALL ENDURA DEVICES. See LL11581 on how to perform a one time script. This is a for sale ad about Applied Materials Endura 5500 VHP PVD System. Applied Materials AMAT Endura Centua WATER LEAK DETECTOR. The item is only for end user.
Please contact us for the availability of the used AMAT ENDURA 5500 PVD semiconductor equipment. C, For Use With: AMAT Precision 5000 CVD Systems, Description: 4-6" Nitride Gas Box, Weight: 21. The item are subject to prior sale without notice. AMAT ENDURA®* CVD / PVD LID CLEAN OBJECTIVE: TO EFFECTIVELY PM THE AMAT ENDURA® CVD / PVD LID IN A TIMELY MANNER, WHILE IMPROVING TOOL RECOVERY, PARTICLE PERFORMANCE, ELIMINATING THE USE OF H 2O 2, AND REDUCING HAZARDOUS WASTE Vacuum Chamber: Vacuum Chamber Process Residue: Vacuum Chamber Components: Old Procedure: Solvent: AMAT ENDURA® CVD/ PVD. AMAT Applied Materials Endura PVD LAMP HALOGEN 120V JCD120V-800WC. Chamber PM of a 1st generation Endura DeGas Chamber.
docx 12 Step 25 : Use ScrubWRIGHT ™ Pen to clean the three lift ring inserts along edge of the Degas Heater Assembly (See Fig 44, 45, 46 & 47). Monthly Verify devices are synchronizing with the time server. This is a global marketplace for buyers and sellers of used, surplus or refurbished AMAT ENDURA. The tool has the ability to quickly deposit thick amounts of metals and can to a certain extent deposit small thicknesses, although the accuracy may not be as good. vacuum chamber pm technique amat endura®* pvd degas chamber 3rd generation heater objective: to effectively pm the applied materials®* endura® pvd degas chamber 3rd generation heater in a timely manner while improving tool recovery and extending the mean time between cleans (mtbc). The AMAT password.
Austin, TX 78732. The Endura system has a long list of firsts: it was the first ultra-high vacuum production system in the industry, enabling enormously improved film purity which reduced electromigration by an order of magnitude, and allowed our customers to fabricate the first reliable aluminum interconnects. item 2 Applied MaterialsRobot Blade, 150 MM JMF HTHU AMAT Endura 1 - Applied MaterialsRobot Blade, 150 MM JMF HTHU AMAT Endura ,995. process control of your Applied Materials Endura System. Specification : Wafer Size: 200mm/ Robot: HP(buffer and Transfer) / Loadlock: Narrow Body / Chamber: A - Pass Thru, B - Cooldown, C - PreClean PIK II, E,F - Orienter/Degas, 1 - Widebody AlCu, 2 - Watercool MCA+, 3 - Widebody TiN, 4 - Watercool MCA+ / 9600 Compressor, Neslab III. Applied MaterialsVectra IMP Source 300mm Endura RF Match AMAT. We rely on Endura systems and its continuous innovations in all our factories to perform a wide range of integrated PVD and CVD applications. AMAT Endura 5500.
5) Enter the User Password and click Enter. SSS Co provides refurbished Applied Materials Endura 5500 equipment and Endura parts, including the AMAT Endura PVD. Manufacturer : Applied Materials Model : ENDURA 5500 Wafer size : 6″ Details : PVD 6″ system, STD 2CH + WIDE 2CH + ORIENT 2CH Condition : as-is. It is a first bullet-proof multichamber, multiprocess system.
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